Vacuum switching unit (31.5 mm width)
Model No. VSQP Vacuum switching unit ideal for controlling l…
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Model No. VSXP, VSXPM
Compact body with a width of 10.5 mm, a vacuum switching unit that can be compactly installed even for use in multiple stations.
[Effective cross-sectional area of vacuum valve]
2-way valve specification : 3.5, 4.5 (㎟)
3-way valve specification : 3.0, 3.6 (㎟)
Model No. VSXP, VSXPM
Compact body with a width of 10.5 mm, a vacuum switching unit that can be compactly installed even for use in multiple stations.
[Effective cross-sectional area of vacuum valve]
2-way valve specification : 3.5, 4.5 (㎟)
3-way valve specification : 3.0, 3.6 (㎟)
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